Interferometric, low coherence shape measurement device for a plurality of surfaces (valve seat) via several reference planes

ABSTRACT

An interferometric measuring device is described for measuring the shape of a surface (A) of an object (BO) having a radiation source (KL) which emits a short-coherent radiation, a beam splitter (ST) for forming an object beam which is directed via an object light path (OW) to the object (BO) and a reference beam which is directed via a reference light path (RW) to a reflective reference plane (TS, SP 1 ) and having an image converter (BW) which picks up the radiation that has been brought to interference and reflected back from the surface (A) and the reference plane (TS, SP 1 ) and sends it to an analyzing device for determining a measurement result pertaining to the surface (A); to analyze the interference peak by scanning, the optical length of the object light path (OW) is altered relative to the optical length of the reference light path (RW), or an intermediate image (ZA) of the surface (A) produced in the object light path (OW) is scanned. A rapid and accurate measurement of spatially separated surfaces is achieved by situating a superposition optics (FO; L 1,  L 2;  LB) in the object light path (OW) for producing simultaneously an image of the one surface (A) and of at least one additional surface (B); at least one additional reference plane (SP, SP 2 ) being situated in the reference light path (RW) according to the number of additional surface(s) (B) for producing different optical lengths in the reference light path (RW), and the radiation which is brought to interference and is reflected back by the at least one additional surface (B) and by the respective additional reference plane (SP, SP 2 ) and is scanned with regard to the interference peak is also sent to the image converter (BW) and is analyzed in the analyzing device to determine the measurement result.

[0001] The present invention relates to an interferometric measuring device for measuring the shape of a surface of an object, having a radiation source emitting a short-coherent radiation, a beam splitter for forming an object beam directed at the object via an object light path and a reference beam aimed at a reflective reference plane via a reference light path and having an image converter which picks up the radiation reflected back from the surface and the reference plane and brought to interference and sends it to an analyzing device for determining a measurement result pertaining to the surface, for the measurement the optical length of the optical light path being varied relative to the optical length of the reference light path or scanning of an intermediate image of the surface generated in the object light path takes place.

BACKGROUND INFORMATION

[0002] An interferometric measuring device of this type is described in German Patent Application 41 08 944 A1 (although the method of scanning an intermediate image given in the present alternative is not mentioned there). With this known interferometric measuring device based on the measuring principle of white-light interferometry or short-coherence interferometry, a radiation source emits short-coherent radiation which is split by a beam splitter into an object beam which illuminates a measuring object and a reference beam which illuminates a reflective reference plane in the form of a reference mirror. To scan the object surface in the depth direction, the reference mirror is moved in the direction of the optical axis of the reference light path by a piezo control element. When the object light path corresponds to the reference light path, the maximum interference contrast is obtained in the area of the coherence length and is detected by a photoelectric image converter and a downstream analyzing device and is analyzed on the basis of the known deflection position of the reference mirror to determine the contour of the object surface.

[0003] Additional such interferometric measuring devices and interferometric measuring methods based on white-light interferometry are described by P. de Groot, L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency domain” J. Mod. Opt., Vol. 42, No. 2, 389-401, 1995 and Th. Dresel, G. Hausler, H. Venzke, “Three-dimensional sensing of rough surfaces by coherence radar,” Appl. Opt., Vol. 31, No. 7, 919-925, 1992.

[0004] Such an interferometric measuring device based on white-light interferometry is also described in German Patent Application 199 48 813 (not published previously); in this method, to perform measurements in narrow hollow spaces in particular, lateral resolution is increased by producing an intermediate image in the object light path. German Patent Application 100 15 878.1, likewise not published previously, proposes scanning of an intermediate image to increase the depth of focus with a relatively high lateral resolution at the same time.

[0005] There are problems with the known interferometric measuring devices and measuring methods if the measurement task requires scanning of several separated surfaces which are several millimeters apart, for example, and/or are oriented at an inclination to one another.

[0006] The object of the present invention is to provide an interferometric measuring device of the type defined in the preamble with which at least two spatially separated surfaces may be measured with accurate and highly reproducible measurement results.

ADVANTAGES OF THE INVENTION

[0007] This object is achieved with the features of claim 1 according to which in addition to producing an image of the one surface, an image can be produced of at least one other surface; at least one additional reference plane which is used for depth scanning is situated in the reference light path according to the number of additional surfaces for generating different optical lengths in the reference light path; and the radiation reflected back by the minimum of one additional surface and the respective additional reference plane and also brought to interference and scanned for the measurement is also sent to the image converter and is analyzed in the analyzing device for determining the measurement result.

[0008] For example, with superposition optics or optics having a corresponding depth of focus, it is possible to detect and image simultaneously multiple separated surfaces of the same object or different objects, e.g., a guide bore and a valve seat. Splitting the reference light path into partial reference light paths having optical lengths adapted to the different surfaces to be measured permits simultaneous scanning or scanning in short intervals and therefore rapid scanning of the interference peaks of the various surfaces, for example. The interfering radiation of the various surfaces is picked up by the image converter simultaneously or in succession and sent to the analyzing device for deriving measurement results, e.g., the position of the various surfaces relative to one another, the height and parallelism and/or the properties of the various surfaces themselves. This simplifies the handling and design of the measuring device.

[0009] Favorable configuration options include a superposition optics being situated in the object light path, permitting generation of an image of the one surface and the minimum of one additional surface; another option is for the additional surface to be imaged on the image converter either directly or by way of at least one intermediate image in the object light path.

[0010] Two advantageous alternative embodiments of the reference light path include a side-by-side configuration or a series configuration of the reference plane and the minimum of one additional reference plane in the reference light path, the minimum of one upstream reference plane being partially transparent in the case of a series configuration. In the case of a side-by-side configuration, different optical elements may be contained in the different partial reference arms.

[0011] Different measurement options are obtained due to the fact that the one surface and the minimum of one additional surface belong to objects positioned simultaneously or in succession, the surface and the minimum of one additional surface being situated at different distances.

[0012] Various favorable embodiments also include the fact that the object light path for generating a common intermediate image of the intermediate image of the surface and the intermediate image of the additional surface(s) is formed in a common intermediate image plane in the object light path, and the common intermediate image is imaged on the image converter either directly or by way of at least one intermediate image. With at least one intermediate image in the object light path, it is possible to scan an intermediate image and also to obtain an increased lateral resolution.

[0013] Other advantageous embodiments are obtained due to the fact that the reference light path is formed in a separate reference arm or in a measurement arm belonging to the object light path.

[0014] Various options for easily measuring different surfaces in hard to reach places are obtained due to the fact that an optical system that is rigid relative to the object is situated in the object light path, and the rigid optical system is followed by an optical system that is movable in the direction of its optical axis.

[0015] An embodiment in which the object light path is designed as an endoscope is especially advantageous for narrow cavities and a measurement having a relatively high lateral resolution.

[0016] The effort of adapting the measuring device to various measurement functions is facilitated by the fact that the rigid optics is part of the optics producing the intermediate image.

[0017] To achieve a robust measurement with respect to relative lateral movement of the object, it is advantageous for the rigid optics to produce images toward infinity.

[0018] The fact that an image of the reference plane or the additional reference plane is within the depth of focus range of the superposition optics contributes to the accuracy of the measurement. It is advantageous here that the image of the reference plane and/or the additional reference plane lie in the plane of the image of the superposition optics, and in addition, with movement of the mobile optics, the image of the reference plane and/or the additional reference plane moves in synchronization with the image plane of the superposition optics.

[0019] An advantageous embodiment of the present invention also includes the rigid optics being the optics producing the intermediate image, e.g., is designed as superposition optics with which at least one intermediate image that is rigid relative to the object is produced and an objective optical system designed as movable optics following behind the rigid intermediate image in the path of the beam being movable in the direction of its optical axis for scanning the intermediate image which is normal to this axis in the depth direction and being designed for imaging same directly on the image converter or by way of one or more intermediate images. Due to the creation of the rigid-intermediate image of the object surface situated in the object light path and of the superposition optics in the object light path, the object surface to be measured is detectable with a relatively high lateral resolution even in narrow channels or boreholes and is evaluatable with regard to the depth structure by using the image converter or the downstream analyzing device. The rigid intermediate image is scannable with relatively simple measures because only few optical components of the object light path need be moved for the depth scanning, the scanned depth of the rigid intermediate image always remaining within the range of the depth of focus of the movable objective optics because due to the depth scanning (depth scan), the object plane of the moving objective optics is likewise moved through the rigid intermediate image, and in this way the interference peaks are analyzed in the area of the greatest focus. In addition, the rigid intermediate image is always aligned or alignable normal to the direction of movement of the objective optics.

[0020] With regard to further details concerning the design of the rigid optics and the movable optics, reference is made to the German Patent Application 101 15 524.7-52 by the present applicant.

[0021] For a short measurement time and an accurate measurement, it is advantageous that the relative change in the optical length of the object light path and the different optical lengths of the reference light path take place in synchronization with one another. Measurement of the different surfaces may take place at the same time or at different times.

[0022] Various favorable possible designs include the superposition optics being designed as free-segment optics having various imaging elements for the surface and the at least one additional surface or being designed as multifocal optics or as optics having a depth of focus of at least the greatest optical path difference of the at least two surfaces. A free-segment optical system having multiple light deflection surfaces and lens elements, for example, is especially suitable for registering surfaces oriented at an inclination to one another, which may also yield object light paths of different lengths, e.g., for measuring the thickness, diameter or alignment of reference surfaces. A multifocal optics is suitable, for example, if surfaces oriented parallel to one another and perpendicular to a main beam path of the object light path are to be observed, e.g., measuring of parallelism, thickness and height, whereas optics having a depth of focus of at least the greatest optical path difference of the at least two surfaces permits simultaneous detection of surfaces oriented parallel to one another with a corresponding distance between them, e.g., measuring of parallelism, thickness and height.

[0023] To achieve accurate measurement results, it is also advantageous that an optical fiber is provided for illuminating the object with a planar wave, its output on the object end being situated in a telecentric imaging arrangement of the object light path, or an illumination light path having additional lenses and deflector elements is formed.

[0024] The measurement is made possible or further facilitated by the fact that the reference light path has optics similar or identical to that of the object light path, making it possible to produce the interference or optimize the interference contrast or compensate for optical effects of the components in the object light path.

DRAWINGS

[0025] The present invention is explained in greater detail below on the basis of embodiments with reference to the drawing:

[0026]FIG. 1 shows a schematic diagram of an interferometric measuring device according to the principle of white-light interferometry (short-coherence interferometry) having a reference light path having two partial reference light paths and a free-segment optical system, the free-segment optical system being illustrated in two positions rotated by 90° relative to one another,

[0027]FIG. 2 shows another embodiment of the interferometric measuring device, two partial reference light paths being formed by way of a mirror and a partially transparent mirror placed in front of it and superposition optics having separate lens elements being formed in the object light path,

[0028]FIG. 3 shows another embodiment of an interferometric measuring device, bifocal optics being situated in the object light path,

[0029]FIG. 4 shows another embodiment of an interferometric measuring device in which the radiation in the reference light path and the object light path is guided with optical fibers, and

[0030]FIG. 5 shows another embodiment of the interferometric measuring device in which the radiation is guided in the object light path via an illumination light path having lenses and deflector elements.

EXEMPLARY EMBODIMENT

[0031] As shown in FIG. 1, an interferometric measuring device based on the principle of white-light interferometry (short-coherence interferometry) has an object light path OW, a reference light path RW, an image converter BW and a downstream analyzing device, as is known per se and described in greater detail in the publications cited in the introduction as well as the literature contained therein. This makes use of the fact that interference occurs only in the area of the coherence length, thus permitting simple coordination of the optical path lengths of reference light path RW and object light path OW as well as detection of the interference peak. Radiation emitted by a short-coherent light source KL has a coherence length on the order of 10 μm, for example. The radiation of short-coherent light source KL is split by a beam splitter ST into a reference beam, which is guided via reference light path RW, and an object beam, which is guided via object light path OW. A fourth and fifth lens L4, L5 are situated in the light path to image converter BW for imaging.

[0032] One particular feature of the interferometric measuring device illustrated in FIG. 1 is that two partial reference light paths having different optical path lengths are formed in reference light path RW, these reference light paths being formed by laterally offset reflective surfaces situated a distance apart from one another with respect to the optical axis, namely a first mirror SP1 and SP2. Reference light paths RW contain compensation optics KO corresponding or similar to respective object light path OW.

[0033] As an additional special feature, superposition optics in the form of a free-segment optics FO is situated in object light path OW and shown in cross section (top diagram) in a 0° view in the illustration shown at the right (middle diagram) and in a 90° view (bottom diagram) in a state in which it is guided into a valve bore BO in proximity to a valve seat VS. Several separate surfaces A, B of bore BO or of valve seat VS can be detected at the same time with free-segment optics FO and imaged in a common intermediate image ZW in an intermediate image plane in the object light path, which is perpendicular to a main optical axis of object light path OW. Free-segment optics FO has several light deflecting surfaces and imaging lens elements and is adapted to the respective measurement requirements. In particular, surfaces A, B situated at different distances from common intermediate image ZW and also situated at an inclination to one another may be detected and imaged in the common intermediate image ZW.

[0034] The partial reference light paths having first mirror SP1 and second mirror SP2 are adapted to various optical path lengths corresponding to surfaces A, B. Detection of the interference peaks corresponding to two surfaces A, B takes place through a change in reference light path RW corresponding to a scanning direction r, the two partial reference light paths being altered in synchronization. The moving unit is shown with broken lines.

[0035] In the embodiment of the interferometric measuring device illustrated in FIG. 2, two partial reference light paths of reference light path RW are formed by an outer mirror SP and a partially transparent mirror TS situated upstream from the former. Superposition optics situated in object light path OW has two lenses connected in parallel, namely a first lens L1 and a second lens L2 having different focal distances, optionally with prism-shaped elements situated in front of them. The object light path is also designed for producing a telecentric image. Surfaces A, B situated parallel to one another and different distances apart, e.g., a few μm to more than 1 cm, and perpendicular to the main optical axis of object light path OW are imaged in an intermediate image plane in the object light path with two lenses L1 and L2 in common intermediate image ZW composed of intermediate image ZA of surface A and intermediate image ZB of surface B. The focal distances of first and second lenses L1, L2 are given as F_(A), F_(B). In addition, a third lens L3 for imaging is situated in the beam path of object light path OW. For detecting the interference peak, the unit of mirror SP and partially transparent mirror TS is moved in scanning direction r so that the changes in the two partial reference light paths take place in synchronization.

[0036]FIG. 3 illustrates an embodiment of the interferometric measuring device in which instead of two lenses L1, L2 in FIG. 2, a bifocal optics LB is situated, its properties corresponding approximately to those of two lenses L1, L2.

[0037] In the embodiment illustrated in FIG. 4, additional lenses L6, L7 are introduced into the beam path of the object light path of bifocal optics LB on the object side. In addition, an optical fiber LL via which short-coherent radiation is conveyed from radiation source KL to illuminate surfaces A, B with a planar wave front via additional lens L7 is also situated in object light path OW. Essentially corresponding lenses are also situated in reference light path RW for compensation and the radiation is also passed in the object light path via an optical fiber.

[0038] In FIG. 5, in comparison with FIG. 4, optical fiber LL in object light path OW is replaced by an imaging light path LW having discrete additional lenses LZ1, LZ2 and deflector elements AE1, AE2 to illuminate surfaces A, B with a planar wave. Additional lenses L6, L7 are not provided here.

[0039] Surfaces A, B that are spatially separated from one another may be measured at the same time using the interferometric measuring devices described above and special optics in the form of the superposition optics mentioned above. The distance, and/or thickness, diameter and parallelism of spatially separated surfaces A, B can be measured in this way. The spatially separated surfaces may be imaged on image converter BW directly or over a common intermediate image ZW in the object light path.

[0040] Common intermediate image ZW may be imaged directly or by way of one or more intermediate images on image converter BW, e.g., a CCD camera.

[0041] With the partial reference light paths and the different optical path lengths achieved in this way, different surfaces A, B may be measured in a rapid and stable manner. The optical path lengths may be adjusted according to the measurement task and may be almost balanced with the optical path lengths of spatially separated surfaces A, B of object light path OW.

[0042] The design of the interferometric measuring device is implemented in the form of a Michelson interferometer, for example. Short-coherent radiation source KL may be, for example, a superluminescence diode or an LED. With illumination through the superposition optics, spatially separated surfaces A, B of the object are illuminated, in which case it is advantageous to illuminate separate surfaces A, B with almost planar waves.

[0043] The superposition optics in the form of free-segment optics FO may be composed of various individual lens systems for example which image different surfaces along different optical axes and with different optical path lengths in the common intermediate image plane. Free-segment optics FO may be implemented in the form of optical elements such as spherical lenses, aspherical lenses, rod lenses or Grin lenses or defractive optical elements, prisms or mirrors, which may also be combined.

[0044] Instead of the design of superposition optics as a bifocal optics LB, multifocal optics may also be used if more surfaces are to be measured. The multifocal optics may be combined with another lens to form a telecentric arrangement, for example.

[0045] For compensation of the optical path lengths and the dispersion in both arms of the interferometer, namely reference light path RW and object light path OW, the fiber lengths and geometries of the optical fibers used must be as identical as possible.

[0046] The superposition optics may be implemented approximately by optics having a great depth of focus or with an expanded focal distance such as Axicon.

[0047] In the case of multifocal optics or bifocal optics as the superposition optics, optics having only one focal plane may also be used for compensation in reference light path RW, as shown in FIG. 3.

[0048] An image of surfaces A, B to be observed superimposed by the reference wave is produced on image converter BW. For data analysis, a change is produced in the pitch difference between the optical path lengths in the object light path and the reference light path (deep scan), the change being caused by scanning movement r, for example. According to the related art, various procedures may be used to change the difference in pitch, e.g., movement of the reference mirror, movement of the object in the depth direction, movement of the objective in the depth direction, movement of the entire sensor relative to the object or intermediate image scanning according to German Patent Application 100 15 878 or a change in the optical path length due to acousto-optical modulators.

[0049] A high interference contrast occurs in the image of the object when the pitch difference in both interferometer arms is smaller than the coherence length. To obtain the 3D height profile, various methods have become established, based on the fact that the pitch difference at which the highest interference contrast occurs is detected during the depth scanning for each image point (pixel). 

What is claimed is:
 1. An interferometric measuring device for measuring the shape of a surface (A) of an object (BO), having a radiation source (KL) which emits a short-coherent radiation, a beam splitter (ST) for forming an object beam which is directed via an object light path (OW) to the object (BO), and a reference beam which is directed via a reference light path (RW) to a reflective reference plane (TS, SP1), and having an image converter (BW) which picks up the radiation that has been brought to interference and reflected back from the surface (A) and the reference plane (TS, SP1) and sends it to an analyzing device for determining a measurement result pertaining to the surface (A), the optical length of the object light path (OW) being altered relative to the optical length of the reference light path (RW) to perform the measurement, or scanning of an intermediate image (ZA) of the surface (A) produced in the object light path (OW) taking place, wherein an image may be produced not only of the one surface (A) but also of at least one additional surface (B); at least one additional reference plane (SP, SP2) is situated in the reference light path (RW) corresponding to the number of additional surface(s) (B) for producing different optical lengths, this additional reference plane being used for depth scanning; and the radiation which is reflected back by the at least one additional surface (B) and by the respective additional reference plane (SP, SP2) and which is also brought to interference and is scanned for the measurement is also sent to the image converter (BW) and is analyzed in the analyzing device to determine the measurement result.
 2. The measuring device according to claim 1, wherein a superposition optics (FO; L1, L2; LB) is situated in the object light path (OW) for producing an image of the surface (A) and the at least one additional surface (B).
 3. The measuring device according to claim 1 or 2, wherein the additional surface (B) is also imaged on the image converter (BW) directly or by way of at least one intermediate image in the object light path (OW).
 4. The measuring device according to claim 3, wherein the reference plane (SP1, TS) and the at least one additional reference plane (SP2, SP) are situated side by side or in succession in the reference light path (RW), in the case of the sequential arrangement the at least one upstream reference plane (TS) being partially transparent.
 5. The measuring device according to one of the preceding claims, wherein the surface (A) and the at least one additional surface (B) belong to objects (BO) positioned simultaneously or in succession, the surface (A) and the at least one additional surface (B) being different distances apart.
 6. The measuring device according to claim 1 or 2, wherein the object light path (OW) for producing a common intermediate image (ZW) of the intermediate image (ZA) of the surface (A) and the intermediate image (ZB) of the additional surface(s) (B) are formed in a common intermediate image plane in the object light path (OW), and the common intermediate image (ZW) is imaged on the image converter (BW) either directly or by way of at least one intermediate image in the object light path (OW).
 7. The measuring device according to one of the preceding claims, wherein the reference light path (RW) is formed in a separate reference arm or in a measurement arm belonging to the object light path (OW).
 8. The measuring device according to one of the preceding claims, wherein an optics that is rigid with respect to the object (BO) is situated in the object light path (OW), and the rigid optics is followed by an optics that is movable in the direction of the former's optical axis.
 9. The measuring device according to one of the preceding claims, wherein the object light path (OW) is designed as an endoscope.
 10. The measuring device according to claim 8, wherein the rigid optics is designed partially or entirely as an endoscope.
 11. The measuring device according to one of claims 8 through 10, wherein the rigid optics is part of the optics producing the intermediate image (ZW).
 12. The measuring device according to one of claims 8 through 11, wherein the rigid optics is part of the superposition optics.
 13. The measuring device according to one of claims 8 through 12, wherein the rigid optics images toward infinity.
 14. The measuring device according to one of claims 8 through 13, wherein an image of the reference plane (TS, SP1) and of the additional reference plane (SP, SP2) is situated in the range of the depth of focus of the superposition optics.
 15. The measuring device according to one of claims 8 through 14, wherein the image of the reference plane (TS, SP1) and the additional reference plane (SP, SP1) are situated in the image plane of the superposition optics.
 16. The measuring device according to one of claims 8 through 15, wherein with movement of the movable optics, the image of the reference plane (TS, SP1) and of the additional reference plane (SP, SP2) moves in synchronization with the image plane of the superposition optics.
 17. The measuring device according to one of claims 8 through 16, wherein the rigid optics is designed as the optics producing the rigid intermediate image, with which at least one intermediate image which is rigid relative to the object (BO) is produced, and, as the movable optics, an objective optical system which follows behind the rigid intermediate image in the path of the beam is designed to be movable in the direction of its optical axis for scanning the intermediate image oriented normal to this axis in the depth direction and imaging same on the image converter (BW) directly or via one or more intermediate images.
 18. The measuring device according to one of claims 8 through 17, wherein the intermediate image has the same image scale for all object points imaged in the intermediate image.
 19. The measuring device according to one of claims 8 through 18, wherein the rigid optics is designed as a 4f configuration.
 20. The measuring device according to one of the preceding claims, wherein the relative change in the optical length of the object light path (OW) and the different optical lengths of the reference light paths (RW) takes place in synchronization.
 21. The measuring device according to one of the preceding claims, wherein the superposition optics is designed as free-segment optics (FO) having different image elements for the surface (A) and the at least one additional surface (B) or as multifocal optics (LB) or as optics having a depth of focus of at least the greatest optical path difference of the at least two surfaces (A, B).
 22. The measuring device according to one of the preceding claims, wherein an optical fiber (LL) is provided for illuminating the object with a planar wave whose output at the object end is situated in a telecentric image arrangement of the object light path (OW) or an illumination light path (LW) is formed with additional lenses (LZ1, LZ2) and deflector elements (AE1, AE2).
 23. The measuring device according to one of the preceding claims, wherein the reference light path (RW) has optics identical or similar to those of the object light path (OW). 